Low-Cost Detection of Thin Film Stress during Fabrication
Optics
Low-Cost Detection of Thin Film Stress during Fabrication (MFS-TOPS-45)
In-situ Measurement Using Fiber Optic Probes
Overview
NASAs Marshall Space Flight Center has developed a simple, cost-effective optical method for thin film stress measurements during growth and/or subsequent annealing processes. Stress arising in thin film fabrication presents production challenges for electronic devices, sensors, and optical coatings; it can lead to substrate distortion and deformation, impacting the performance of thin film products.
NASA's technique measures in-situ stress using a simple, noncontact fiber optic probe in the thin film vacuum deposition chamber. This enables real-time monitoring of stress during the fabrication process and allows for efficient control of deposition process parameters. By modifying process parameters in real time during fabrication, thin film stress can be optimized or controlled, improving thin film product performance.
The Technology
Traditional methods of determining film stress use ex-situ deflectometry techniques and require significant and costly modifications to the vacuum chamber to allow optical access to the substrate. These techniques determine film stress by measuring the change in substrate curvature resulting from stress.
NASA's method infers the stress-induced substrate curvature by measuring the out-of-plane displacement of a single point on the substrate using a fiber optic displacement sensor (Figure 1). The probe gains optical access to the substrate through a normal fiber optic feed-through common in vacuum systems. In turn, this simplification leads to a significant reduction in cost, complexity, and system requirements. It also eliminates interference effects. With a measurement sensitivity of 0.05 N/m, the method is comparable in sensitivity with MOSS and could potentially rival the sensitivity of the microcantilever technique. NASA's method can be used to measure the stress during film growth for heated substrates, as well as the evolution of stress during thermal annealing processes. The technique can be used in a variety of thin film applications, with no limitation on substrate size or reflective characteristics of deposited films. The methodology has been proven with magnetron sputtering of chromium films, where it was used to adjust process gas pressure to achieve zero stress.
Benefits
- Low-cost, simple design - Uses inexpensive off-the-shelf fiber optic probes, reducing costs by an order of magnitude or more
- Real-time measurement - Provides immediate feedback via in-situ probes, facilitating the efficient adjustment of deposition process parameters
- Easy to implement - Requires little or no modification to the existing vacuum chamber
- Versatile - Applies to a wide range of thin film and bulk material applications
- SensitiveOffers sensitivity of 0.05 N/m, comparable to existing techniques, such as the multibeam optical stress sensor (MOSS)
Applications
- Semiconductors - Electronic devices; solar cells; printed circuit boards
- Optics - Coatings
- Magnetics - Read/write heads
- Precision machining - Metrology of surfaces; surface plates
Technology Details
Optics
MFS-TOPS-45
MFS-33169-1
MFS-33169-1-PCT
MFS-33169-1-DIV
Similar Results
Lightweight Fiber Optic Sensors for Real-Time Monitoring of Structural Health
How It Works
The FOSS technology employs efficient, real-time, data driven algorithms for interpreting strain data. The fiber Bragg grating sensors respond to strain due to stress or pressure on the substrate. The sensors feed these strain measurements into the systems algorithms to determine shape, stress, temperature, pressure, strength, and operational load in real time.
Why It Is Better
Conventional strain gauges are heavy, bulky, spaced at distant intervals (which leads to lower resolution imaging), and unable to provide real-time measurements. Armstrong's system is virtually weightless, and thousands of sensors can be placed at quarter-inch intervals along an optical fiber the size of a human hair. Because these sensors can be placed at such close intervals and in previously inaccessible regions (for example, within bolted joints, embedded in a composite structure), the high-resolution strain measurements are more precise than ever before. The fiber optic sensors are non-intrusive and easy to install—thousands of sensors can be installed in less time than conventional strain sensors and the system is capable of processing information at the unprecedented rate of 100 samples per second. This critical, real-time monitoring capability enables an immediate and informed response in the event of an emergency and allows for precise, controlled monitoring to help avoid such scenarios.
For more information about the full portfolio of FOSS technologies, see DRC-TOPS-37 or visit https://technology-afrc.ndc.nasa.gov/featurestory/fiber-optic-sensing
Enhanced Fabrication Improves Temperature Sensing in Cryogenic Humid Environments
This technology was developed to improve Armstrong's multi-patented FOSS system, which has long been used to measure temperature and liquid levels in cryogenic environments. When the sensing system's fibers trapped humidity from the surrounding environment before their submersion into cryogenic liquids, the moisture adversely affected outputs. A new manufacturing process solves this problem, increasing reliability and accuracy not only of NASA's FOSS but also any fiber optic sensing system.
How It Works
Armstrong has developed a two-step process to assemble the sensors. First, the bare sensor fiber is inserted into an oven to expel all moisture from the fiber coating. Then, the moisture-free fiber is placed inside a humidity-controlled glove box to prevent it from absorbing any new moisture. While inside the glove box, the fiber is inserted into a loose barrier tubing that isolates the fiber yet is still thin enough to provide adequate thermal transfer. The tubing can be further purged with various gases while it is inside the glove box to provide additional moisture isolation.
This innovation is particularly useful for fiber optic systems that measure temperature and that identify any temperature stratifications within cryogenic liquids.
Why It Is Better
This process seals sensor fibers from environmental moisture, enabling fiber optic sensing systems to operate reliably in humid environments. The innovation eliminates erroneous readings that can occur due to moisture collection on the fiber sensors.
For more information about the full portfolio of FOSS technologies, see DRC-TOPS-37 or visit https://technology-afrc.ndc.nasa.gov/featurestory/fiber-optic-sensing
Interim, In Situ Additive Manufacturing Inspection
The in situ inspection technology for additive manufacturing combines different types of cameras strategically placed around the part to monitor its properties during construction. The IR cameras collect accurate temperature data to validate thermal math models, while the visual cameras obtain highly detailed data at the exact location of the laser to build accurate, as-built geometric models. Furthermore, certain adopted techniques (e.g., single to grouped pixels comparison to avoid bad/biased pixels) reduce false positive readings.
NASA has developed and tested prototypes in both laser-sintered plastic and metal processes. The technology detected errors due to stray powder sparking and material layer lifts. Furthermore, the technology has the potential to detect anomalies in the property profile that are caused by errors due to stress, power density issues, incomplete melting, voids, incomplete fill, and layer lift-up. Three-dimensional models of the printed parts were reconstructed using only the collected data, which demonstrates the success and potential of the technology to provide a deeper understanding of the laser-metal interactions. By monitoring the print, layer by layer, in real-time, users can pause the process and make corrections to the build as needed, reducing material, energy, and time wasted in nonconforming parts.
Real-Time 3D Shape Rendering
This technology measures differential strain through a unique computational method, offering real-time 3D shape rendering. Embedding sensors into the optical fiber and then attaching the fiber to a structure allows strain information to be collected and shape deformation determined. Once the strain data is correlated into displacement data, the shape and movement of the optical fiber, and therefore the attached structure, can be displayed in real time.
How It Works
To obtain the curvature and torsion, innovators embedded three optical fibers with sensors either with fiber Bragg gratings (FBGs) or other methods of obtaining strain through optical fiber. The strain of each fiber is measured through Armstrong's patent-pending strain algorithm and fiber optic strain sensor (FOSS) hardware, which interrogates the fiber at a rate of 100 samples per second. Armstrong innovators have also patented a method to mitigate signal loss due to polarization-induced fading (PIF), a common problem seen in multi-sensor fiber optic sensing systems. This ensures that signals from all sensors can be optimally retrieved, increasing the system's accuracy and reliability.
Why It Is Better
The most significant benefit of Armstrong's 3D shape rendering technology is its unparalleled speed. Its sophisticated algorithms enable real-time shape rendering without any lag time whatsoever. This capability is especially valuable for applications where a direct line of sight is impossible or impractical (as in an aircraft wing or underground pipelines) and where real-time structural health monitoring is critical. The small and lightweight system uses virtually weightless fiber optics and minimal hardware. Furthermore, the sensors can be placed at 1/4-inch intervals, enabling much more precise, high-resolution measurements than ever before. For the first time ever, real-time strain measurements can be used to determine the shape of an aircraft's wing, monitor the structural integrity of buildings and pipelines, or ensure precise placement of the tiniest catheters, to name just a few potential applications.
Highly Accurate Position Detection and Shape Sensing with Fiber Optics
NASA's novel method was developed to more accurately measure the position and shape of optical fibers. Multi-core optical fibers contain multiple light-guiding cores arranged symmetrically. Sensors, such as FBGs, are embedded into each of the cores (Figure 1). Such an arrangement allows for the measurement of strain in each core of the fiber at specific axial locations along the fiber. When a multi-core fiber is subjected to bending, the strain imposed in each core relative to one another is used to provide position information (Figure 2).
In the past, shape-sensing measurements using optical fibers estimated bending at sequential points along the fiber, and the resulting measurement had many discontinuities and errors. The combination of these errors resulted in a very poor indication of actual fiber position in three-dimensional space. NASA's patent-pending algorithms and apparatus incorporate not only fiber bending measurements, but fiber twisting measurements as well, to eliminate previous sources of error. The uniqueness of the algorithm is in how the curvature, bend-direction, and twisting information of the fiber are all brought together to obtain a highly accurate 3-D location and shape characterization. The new methods have been demonstrated to significantly improve the accuracy of multi-core fiber optic shape sensors.



