Room temperature oxygen sensors

A typical sensor device includes a set of interdigitated microelectrodes fabricated by photolithography on silicon wafer or an electrically insulating substrate. In preparation for fabricating the SWCNT portion of such a sensor, a batch of treated (coated or doped) SWCNTs is dispersed in a solvent. The resulting suspension of SWCNTs is drop-deposited or injected onto the area containing the interdigitated electrodes. As the solvent evaporates, the SWCNTs form a mesh that connects the electrodes. The density of the SWCNTs in the mesh can be changed by varying the concentration of SWCNTs in the suspension and/or the amount of suspension dropped on the electrode area. To enable acquisition of measurements for comparison and to gain orthogonality in the sensor array, undoped SWCNTs can be similarly formed on another, identical set of interdigitated electrodes. Coating materials tested so far include chlorosulfonated polyethylene. Dopants that have been tested include Pd, Pt, Au, Cu and Rh nanoparticle clusters. To date, the sensor has been tested for NO2, NH3, CH4, Cl2, HCl, toluene, benzene, acetone, formaldehyde and nitrotoulene.

Conventional ambient-temperature oxygen sensors are limited in various ways: optically based sensors can be expensive and challenging to manufacture; electrochemical cells with liquid electrolytes can have limited lifetimes and become leak sources; and both types of sensors are difficult to miniaturize. These problems are addressed with Glenn's novel ambient temperature oxygen microsensor, which is based on a Nafiontm polymer electrolyte, microfabricated using thin-film technologies. In the past, one drawback of Nafiontm film has been that it can lose conductivity when the moisture content in the film is too low, potentially affecting sensor operation. Glenn researchers devised a method to use certain salts to hold water molecules in the Nafiontm film structure at room temperature. The presence of these salts provides extra sites in the film to promote proton (H+) mobility, thus improving film conductivity and overall sensor performance, particularly in arid and high-temperature environments. The innovative use of metal/metal oxide as the reference electrode enables miniaturization by eliminating the reference gas and sealing the reference electrode. The combination of interdigitized electrodes with the unique metal/metal oxide reference electrode permits sensor operation in either potentiometric or amperometric mode, as appropriate. In potentiometric mode, which measures voltage differences between working and reference electrodes in different gases, the voltage differences can be monitored with a voltmeter; however, the sensor itself does not need a power source. In room-temperature testing, the sensor achieved repeatable responses to 21 percent oxygen in nitrogen (using nitrogen as a baseline gas), and also detected oxygen from 7 to 21 percent, making Glenn's breakthrough technology usable for personal health monitoring as well as fire detection, fuel-leak detection, and environmental monitoring.

The technology is a solid state, Carbon Dioxide (CO2) sensor configured for sensitive detection of CO2 having a concentration within the range of about 100 Parts per Million (ppm) and 10,000 ppm in both dry conditions and high humidity conditions (e.g., > 80% relative humidity). The solid state CO2 sensor achieves detection of high concentrations of CO2 without saturation and in both dynamic flow mode and static diffusion mode conditions. The composite sensing material comprises Oxidized Multi-Walled Carbon Nanotubes (O-MWCNT) and a metal oxide, for example O-MWCNT and iron oxide (Fe2O3) nanoparticles. The composite sensing material has an inherent resistance and corresponding conductivity that is chemically modulated as the level of CO2 increases. The CO2 gas molecules absorbed into the carbon nanotube composites cause charge-transfer and changes in the conductive pathway such that the conductivity of the composite sensing material is changed. This change in conductivity provides a sensor response for the CO2 detection. The solid state CO2 sensor is well suited for automated manufacturing using robotics and software controlled operations. The solid state CO2 sensor does not utilize consumable components or materials and does not require calibration as often as conventional CO2 sensors. Since the technology can be easily integrated into existing programmable electronic systems or hardware systems, the calibration of the CO2 sensor can be automated.

An array of carbon nanotubes (CNTs) in a substrate is connected to a variable-pulse voltage source. The CNT tips are spaced appropriately from the second electrode maintained at a constant voltage. A sequence of voltage pulses is applied and a pulse discharge breakdown threshold voltage is estimated for one or more gas components, from an analysis of the current-voltage characteristics. Each estimated pulse discharge breakdown threshold voltage is compared with known threshold voltages for candidate gas components to estimate whether at least one candidate gas component is present in the gas. The procedure can be repeated at higher pulse voltages to estimate a pulse discharge breakdown threshold voltage for a second component present in the gas. The CNTs in the gas sensor have a sharp (low radius of curvature) tip; they are preferably multiwall carbon nanotubes (MWCNTs) or carbon nanofibers (CNFs), to generate high-strength electrical fields adjacent to the current collecting plate, such as a gold plated silicon wafer or a stainless steel plate for breakdown of the gas components with lower voltage application and generation of high current. The sensor system can provide a high-sensitivity, low-power-consumption tool that is very specific for identification of one or more gas components. The sensors can be multiplexed to measure current from multiple CNT arrays for simultaneous detection of several gas components.

Because chemical sensors are used in many aspects of space missions, NASA researchers are continually developing ever smaller and more robust sensors that can be manufactured inexpensively and in high quantities; e.g., in batches. Glenn has developed a way to inexpensively fabricate microsensors using a sacrificial template approach. A nanostructure, such as a carbon nanotube, serves as a template, which can then be coated with a high-temperature oxide material. The carbon nanotube can be burned off, or sacrificed, leaving only the metal oxide. The resulting structure provides the unique morphology and properties of the carbon nanotube, which are advantageous for sensing, along with the material durability and high-temperature sensing capabilities of the metal oxide. This technique increases the surface area available for sensing because both the interior and exterior of the resulting microsensor can be used for gas detection, significantly increasing performance. The fabrication of these microsensors includes three major steps: (1) synthesis of the porous metal or metal oxide nanostructures using a sacrificial template, (2) deposition of the electrodes onto alumina substrates, and (3) alignment of the nanostructures between the electrodes. The invention has been demonstrated for methane detection at room temperature (using tin oxide, with carbon nanotubes as the sacrificial template). The microsensor offers low power consumption (no heating required), compact size, extremely low cost, and simple batch-fabrication.